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CHANL is operated as a recharge center, with user fees charged to recover the cost of instrument maintenance, supplies and materials. The fees for each resource are described in the table below. Users are required to sign in and out of a logbook to track the amount of time used on a particular tool for billing purposes.
|
Instrument
|
Description
|
UNC
|
Non-UNC Academic
|
Industry
|
|
ASML Stepper (NCSU)
|
ASML 193nm 5500/950B Stepper
|
$180/hr
|
$180/hr
|
$450/hr
|
|
FIB
|
FEI Helios 600 Nanolab Dual Beam System
|
$30/hr
|
$44/hr
|
$150/hr
|
|
SEM
|
Scanning Electron Microscope
|
$23/hr
|
$33/hr
|
$115/hr
|
| ESEM |
FEI Quanta VP-SEM |
$24/hr |
$35/hr |
$120/hr |
| EDS(SEM/ESEM/FIB/TEM) |
Oxford INCA |
$5/hr |
$7/hr |
$20/hr |
| TEM(100CX-II) |
JEOL(100kV) |
$30/hr |
$44/hr |
$150/hr |
| TEM(2010F-FasTEM) |
JEOL (200kV) |
$36/hr |
$52/hr |
$180/hr |
| XPS |
Kratos Axis Ultra |
$20/hr |
$30/hr |
$100/hr |
| AFM |
Asylum MFP3D |
$20/hr |
$30/hr |
$100/hr |
| Confocal |
|
$15/hr |
$22/hr |
$75/hr |
| Ellipsometer |
JA Woolam Co. Inc. |
$15/hr |
$22/hr |
$75/hr |
| Cleanroom Base Rate |
|
$20/hr |
$30/hr |
$100/hr |
| PECVD |
Advanced Vacuum Vision 310 |
$10/hr |
$15/hr |
$50/hr |
| DRIE |
Alcatel AMS 100 |
$15/hr |
$22/hr |
$75/hr |
| RF-Sputter Deposition |
Kurt Lesker |
$10/hr |
$15/hr |
$50/hr |
|
Labor
|
Training & Sample Analysis Assistance
|
Free
|
$50/hr
|
$75/hr
|
|
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Last Updated on Wednesday, 30 September 2009 13:36 |
User Fees & Billing
